Manufacturing of MEMS

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Manufacturing of MEMS
MEMS (Micro Electro Mechanical Systems) is an integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate through microfabrication technology.

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It can be though as brains of a system. Sensors gather information from the environment through mechanical, thermal and magnetic phenomena after which the electronics process the information derived from the sensors through some decision-making capability direct the actuators to respond by moving, positioning, regulating, pumping, and filtering, thereby controlling the environment for some desired outcome or purpose. In a typical MEMS configuration, integrated circuits (ICs) provide the “thinking” part of the system, while MEMS complement this intelligence with active perception and control functions. The micromechanical components in the fabrication of the MEMS are fabricated using highly compatible "micromachining" processes which will etch away the required parts only of the silicon wafer or will add structural layers to form the mechanical and electromechanical devices.

Project Description:

  1. The MEMS process is structured in a sequence of operations to form these devices i.e. Deposition Process, Etching Process and Lithography.
  2. In deposition Process we deposit thin films of materials. It is assumed that a thin film has a thickness around 100-150 micrometer.
  3. The deposition can happen in two ways i.e. chemical vapor deposition, electrodeposition or Physical reaction i.e. Physical Vapor Deposition (PVD) or Casting.
  4. In CVD the substrate is placed inside a tube in which various gases are passed the motive is some chemical reaction takes place because of that that will generate a solid material as a product which condenses on surfaces.
  5. The other method is PVD in which material is released from a source and transferred to the substrate.
  6. In Etching Process, the second step is manufacturing MEMS there are again two methods wet etching and dry etching in wet etching immerse the material in chemical solution and in dry etching material is sputtered using reactive ions.
  7. The last step is Lithography module the standard steps found in lithography module are dehydration back, HDMS prime, resist, soft bake, alignment, exposure, and descum. Not all the methods will contain all the steps.
  8. Once this is done the fabrication of the MEMS is done.

Project Application:


    Skyfi Labs Projects
    MEMS devices are changing the world of today to a new possibility for tomorrow. Scientists have even come together and created “smart dust” which is a million of miniscule MEMS sensors spread over military sites so that they can be used to communicate information to humans or computers ready to interpret possible troop movements. “Smart roads” will have MEMS devices embedded in them, conveying information about the roadway conditions, traffic and accidents to automobile-mounted global positioning systems, allowing drivers to avoid problems and alerting highway workers to areas that are potential trouble spots.

    MEMS accelerometers are quickly replacing conventional accelerometers for crash air-bag deployment systems in automobiles. The conventional approach uses several bulky accelerometers made of discrete components which are mounted in the front end of the vehicle with separate electronics near the air-bag.

Kit required to develop Manufacturing of MEMS:
Technologies you will learn by working on Manufacturing of MEMS:

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